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SEMICONDUCTOR INDUSTRY

INNOVATIONS FOR
THE FUTURE

The driving force behind our

digital transformation

The semiconductor industry is one of the most dynamic and innovative sectors in the world and is also the driving force behind the digital transformation of our society and economy. From smartphones to self-driving cars, artificial intelligence to renewable energy, none of these would be possible without semiconductors. The semiconductor sector is also one of the most competitive and demanding sectors and is propelled by Moore's Law. With the emergence of new theories like 'More Moore' and 'More than Moore' - in which chip architectures are becoming even smaller and more complex, and systems integration is taking off at a tremendous pace – the limits haven't been reached for the moment. On the contrary! There is a constant need for new technologies, materials, and processes to reduce energy consumption and production costs and push the boundaries of what can be achieved. VDL ETG is therefore preparing for further global growth, both in production and design capacity.

Increasingly stringent cleanliness requirements are proving a major challenge for the industry, however. By investigating how contaminants occur, move, and are deposited, we are finding ways to prevent them ending up in critical locations.

The driving force behind our

digital transformation

The semiconductor industry is one of the most dynamic and innovative sectors in the world and is also the driving force behind the digital transformation of our society and economy. From smartphones to self-driving cars, artificial intelligence to renewable energy, none of these would be possible without semiconductors. VDL ETG is therefore preparing for further global growth, both in production and design capacity.

Increasingly stringent cleanliness requirements are proving a major challenge for the industry, however. By investigating how contaminants occur, move, and are deposited, we are finding ways to prevent them ending up in critical locations.

Our module

CUTTING-EDGE TECHNOLOGY

Are you curious about the technology behind the latest electronic products, such as smartphones and self-driving cars? Then you will want to know more about the Wafer Handler. This module is the first step in the exposure process, an important part of chip production. It safely and accurately moves wafers, on which the chips are built. It consists of thousands of parts, the most complex of which are developed, produced, assembled, tested and qualified by us.

The Wafer Handler offers precision, speed and reliability without compromising stability. The wafer is positioned with a precision that is twice as thin as a human hair, while the temperature at the end of the process varies by only a few thousandths of a degree. Thanks to advanced gripping systems, the wafer is passed as cleanly as possible, minimizing contamination. And did you know that this system makes a new wafer available every 10 seconds? With this technical marvel, we are responding to current and future technologies!

Our methods

PARTICLE GENERATION

Even the smallest contaminants can have a huge impact on our products like the Wafer Handler. As a module in the chip machine that touches the wafers the most, contamination research is essential. We investigate, among other things, how they arise: for example, by measuring material wear on both macro and micro levels.

An example is our Particle Component Test: a unique tool that measures wear on a macro level. This enables us to determine how many contaminants our modules generate. But it doesn't stop there. Using a new mathematical model, we simulate on a micro level the complex deformations that occur when molecular bonds within a material break when subjected to excessive stress. This method is more accurate than other calculation models and also takes the behaviour of materials into account. This research helps us to determine design guidelines for, for example, the gripping systems of the Wafer Handler, allowing us to design and build these systems cleaner.

Our methods

PARTICLE TRANSFER

The increasingly stringent cleanliness requirements pose a significant challenge for the industry. To guarantee the performance and reliability of our products such as the Wafer Handler, we try to analyse and optimize the flow of air and particles in various ways. One of the methods we use for that purpose is Particle Imaging Velocimetry (PIV). This optical measurement technique allows us to visualize and analyse flow patterns and turbulences in our designs.

In our GLOW test rig, we make particle flows visible by blowing smoke-like particles through or past a product using a fan. Then, a laser lights them up, allowing us to analyse and calculate the flow using cameras. This also allows us to test how moving parts affect the flow: for example, what happens when a gripping system moves through the space? This helps us to improve and make our designs more efficient.

Our methods

PARTICLE REMOVAL

The world around us is full of dust and particles that not only affect our products, but our customers' products as well. At VDL ETG, we study not only the generation, flow and precipitation of particles, but also ways of preventing them from landing on critical components. To control contamination at source, we developed the Plasma Seal – an innovative system used in sensitive systems that transport wafers. This allows us to put pollutant particles in a gaseous state, apply an electrical charge to them, and then – using electric fields, air currents or gravity – direct and remove them in a controlled way, making it easier for our customers to meet their cleanliness requirements.

The Plasma Seal itself also has a unique, clean design, in which the motor is not in the robotic arm but under the machine. The machine also has special magnetic guide wheels that do not touch the robotic arm. This prevents the release of dust particles due to wear and tear.

Wafer Handler
Particle Component Test
GLOW - test rig
Particle Removal

Our module 

CUTTING-EDGE TECHNOLOGY

Are you curious about the technology behind the latest electronic products, such as smartphones and self-driving cars? Then you'll want to learn more about the Wafer Handler. This module is the first step of the lighting process, an important part in chip production. This involves moving wafers, on which chips are built, safely and precisely. It consists of thousands of parts, the most complex of which are developed, manufactured, assembled, tested and qualified by us.

The Wafer Handler offers precision, speed and reliability without compromising stability. The wafer is positioned with a precision twice as thin as a human hair, while the temperature at the end of the process varies by only a few thousandths of a degree. Thanks to advanced gripping systems, the wafer is transferred as cleanly as possible and contamination is kept to a minimum. And did you know that because of our module, a new wafer is available every 10 seconds? With this technical mastery, we are responding to current and future technologies!

Our methods

PARTICLE GENERATION

Even the smallest contaminants can have a huge impact on our products like the Wafer Handler. As a module in the chip machine that touches the wafers the most, contamination research is essential. We investigate, among other things, how they arise: for example, by measuring material wear on both macro and micro levels.

An example is our Particle Component Test: a unique tool that measures wear on a macro level. This enables us to determine how many contaminants our modules generate. But it doesn't stop there. Using a new mathematical model, we simulate on a micro level the complex deformations that occur when molecular bonds within a material break when subjected to excessive stress. This method is more accurate than other calculation models and also takes the behaviour of materials into account. This research helps us to determine design guidelines for, for example, the gripping systems of the Wafer Handler, allowing us to design and build these systems cleaner.

Our methods

PARTICLE TRANSFER

The increasingly stringent cleanliness requirements pose a significant challenge for the industry. To guarantee the performance and reliability of our products such as the Wafer Handler, we try to analyse and optimize the flow of air and particles in various ways. One of the methods we use for that purpose is Particle Imaging Velocimetry (PIV). This optical measurement technique allows us to visualize and analyse flow patterns and turbulences in our designs.

In our GLOW test rig, we make particle flows visible by blowing smoke-like particles through or past a product using a fan. Then, a laser lights them up, allowing us to analyse and calculate the flow using cameras. This also allows us to test how moving parts affect the flow: for example, what happens when a gripping system moves through the space? This helps us to improve and make our designs more efficient.

Our methods

PARTICLE REMOVAL

The world around us is full of dust and particles that not only affect our products, but our customers' products as well. At VDL ETG, we study not only the generation, flow and precipitation of particles, but also ways of preventing them from landing on critical components. To control contamination at source, we developed the Plasma Seal – an innovative system used in sensitive systems that transport wafers. This allows us to put pollutant particles in a gaseous state, apply an electrical charge to them, and then – using electric fields, air currents or gravity – direct and remove them in a controlled way, making it easier for our customers to meet their cleanliness requirements.

The Plasma Seal itself also has a unique, clean design, in which the motor is not in the robotic arm but under the machine. The machine also has special magnetic guide wheels that do not touch the robotic arm. This prevents the release of dust particles due to wear and tear.

Global

COOPERATION

The semiconductor industry brings together numerous complex processes and expensive, sophisticated equipment. Many companies supplying this industry are VDL ETG customers. For decades now, we have been working very closely with one of them, a manufacturer of photolithographic equipment, to design and produce modules and systems for their equipment. We are also working with several customers who provide equipment for complex semiconductor processes such as deposition (CVD/PVD), metrology, and inspection.

Tomorrow's

technology

Our involvement extends from the smallest particles on Earth, in CERN's particle accelerator, to the vastness of the universe, with the mirrors of the world's largest telescope in Chile - and everything in between.

Analytical industry

Analytical industry

More info
Medical industry

Medical industry

More info
Science & industry

Science & industry

More info

Tomorrow's

technology

Our involvement extends from the smallest particles on Earth, in CERN's particle accelerator, to the vastness of the universe, with the mirrors of the world's largest telescope in Chile - and everything in between. Please check the other industries:

Pijl-bullet-point.pngAnalytical industry;

Pijl-bullet-point.pngMedical industry;

Pijl-bullet-point.pngScience and industry.